Specializes in Thin-film Materials Nanotec Corp.

NTH Series

DASH-700: Multi-Processing Capability

The Multi-700 is the latest addition to our product line. It uses several PVD and other deposition techniques to deposit multi-layer thin-films. Current deposition techniques include: dc hot filament plasma PVD, ion-mixing(implantation), DC and RF magnetron sputter, and both cathodic arc and hollow cathode discharge ion plating. There are 5 flange ports which allow up to five process sources to be added to the chamber at one time.

Current applications include:

  • Ion Mixing DLC
  • Sputtered WC-DLC
  • Sputtered Si-DLC




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